In this paper, sol-gel TiO2−ZrO2 films with one layer, three layers and five layers were deposited on the X2CrNiMo17-12-2 (AISI 316L) austenitic stainless steel by dip coating method. Calcination was carried out at 400 °C and 600 °C. \nPhase composition of sol-gel TiO2–ZrO2 films were analysed by X-ray diffraction (XRD).\nFor quantitative depth profile analysis of sol-gel TiO2−ZrO2 films the following two different analytical techniques were used and compared: glow-discharge optical emission spectrometry (GD-OES) and time-of-flight elastic recoil detection analysis (TOF-ERDA).\nObtained results of GD-OES and TOF-ERDA spectrometry indicated that the depth of the deposited films was increased by increasing the number of deposited layers, as well as by increasing the calcination temperature. \nAlso, it was found that diffusion of some elements (mainly Cr and Fe) from substrate through interface and film was increased by increasing the calcination temperature.